3.155/6.152 Micro/Nano Processing Tech
Spring 2011
Instructors: Scott Poesse, Gale S Petrich, Caroline A Ross, Harlan Breindel, Leslie A Kolodziejski
TA: Sheila P. Nabanja
Lecture: MW2.30-4 (2-105)
Announcements
Poster Session DETAILS
Dear Class,I want to give you some information regarding the upcoming poster session on Monday, May 9th. The time is during our class, 2:30-4pm, but the location is 34-302. By the end of the day on Wednesday, May 4th, you must send your poster to Fletch for printing. His email is fletch1@eecs.mit.edu. He will print out your poster and then you can arrange to pick it up from him. Remember, the poster will be presented by your team of two and each author must contribute equally to the discussion. Each author will receive the same grade.
Sheila
Announced on 02 May 2011 11:05 a.m. by Sheila P. Nabanja
Quiz Review
The review session will be in room 26-210, 5:00-6:30pm on Friday 11 March.Announced on 09 March 2011 2:07 p.m. by Sheila P. Nabanja
In-class exam, 16 March
Announced on 02 March 2011 2:51 p.m. by Caroline A Ross
PS4 q2
Hints on PS4 q2
We had a few questions about this, so I am posting some hints to get you started on the question if you're stuck.
a) You know the growth rate of the film. Just divide by the diameter of an Al atom.
b) From the vacuum lecture we know how the mean free path is related to the pressure. The Al has to travel 20 cm to reach the substrate. To ensure no collisions, the MFP needs to be at least 20 cm.
c) From a, we know the arrival rate of the Al in monolayers per sec. From the answer to b, we know the residual gas pressure, and therefore can calculate the number of monolayers of gas (=impurity) hitting the substrate per sec. If all of this material sticks, you can estimate the film purity as (amount of Al arriving)/(amount of Al plus amount of residual gas arriving)
d) Do the same as in part c, but now the residual gas pressure is given as 10^-8 torr so the amount of gas arriving will be different.
Announced on 01 March 2011 12:39 p.m. by Caroline A Ross
Office Hours Tue 12:30-1:30p
Hi All,If you have questions about the material we've covered so far or the homework due on 9/Feb, feel free to stop by 36-297 for Office hours tomorrow Tuesday 12:30-1:30p.
-Sheila
Announced on 07 February 2011 2:45 p.m. by Sheila P. Nabanja
